RAMLAN, S.; MD FAUADI, M.; RAZALI, N.; HAO, X. AGENT-BASED CHEMICAL MECHANICAL PLANARIZATION QUALIFICATION FOR SEMICONDUCTOR WAFER FABRICATION. Journal of Advanced Manufacturing Technology (JAMT), [S. l.], v. 15, n. 3, 2021. Disponível em: https://ojsdemo.utem.edu.my/jamt/article/view/6219. Acesso em: 6 jul. 2025.