DERAMAN, M.; EBRAHIM, Z.; OMAR, G.; HASSAN, W.; CHIK, A.; DARMAWAN, Z. MODEL OF RULE PARAMETER CREATION FOR WAFER SCRAP PREVENTION IN THE APPLIED MATERIALS CENTURA 5200 METAL ETCHER PROCESS. Journal of Advanced Manufacturing Technology (JAMT), [S. l.], v. 17, n. 3, 2023. Disponível em: https://ojsdemo.utem.edu.my/jamt/article/view/6587. Acesso em: 6 jul. 2025.