RAMLAN, S.; SHRI ABDUL AZIZ, M.; MD FAUADI, M.; MUHAMMAD, M. Experimental Study on Chemical Mechanical Planarization Process by Manufacturing Automated System. Journal of Advanced Manufacturing Technology (JAMT), [S. l.], v. 12, n. 1(2), p. 313–326, 2018. Disponível em: https://ojsdemo.utem.edu.my/jamt/article/view/4289. Acesso em: 6 jul. 2025.